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PBN0953 PBN Heater, Pyrolytic Boron Nitride Heaters

  • Catalog No. PBN0953
  • Size Diameter: 0.5"~4"
  • Material PBN, Pyrolytic Boron Nitride, and PG Pyrolytic Graphite
  • Purity 99.99%
  • Color Black and White
sc/1678257313-normal-pbnpg-composite-heating-elements.jpg

PBN Heater Description

High-purity and high-performance pyrolytic boron nitride ceramics are used as the substrate for the PBN heaters. Pyrolytic graphite (PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.

As both PG and PBN are extremely pure (99.99% or even higher) and very stable in vacuum or inert atmosphere, the PBN-PG heating element could be very durable and keep the chamber clean. It could be heated to ultra high 1600 ℃ in a very short time without emission of any gas component. These heating elements are ideal products for the semiconductor industry and applications that requires high temperature, high vacuum, and high purity.

Diameter 0.5”~4”
Power 150~3000W
Max. Working Temp. 2400 ℃

 

 

PBN Heater Specification

Item

value

Unit

lattice constant

a:2.504×10-10 c:6.692×10-10

μ m

density

2.0-2.19

g/cm3

resistivity

3.11×1011

Ω·cm

tensile strength(ab)

153.86

N/mm2

bend strength

c

243.63

N/mm2

ab

197.76

N/mm2

elastic modulus

 

235690

N/mm2

thermal conductivity

 

“a” direction “c” direction

 

(200℃)

60 2.60

W/m·k

(900℃)

43.70 2.80

W/m·k

dielectric strength(at room temperature)

56

KV/mm

 

PBN Heater Advantages

  • PBN composite heating element has an operating temperature of = 1600°C.
  • High mechanical durability and dimensional stability.
  • Dimensionally compact. The PBN layer provides electrical insulation.
  • Thermal gradients can be tailored to meet specific requirements.
  • Eliminate outgassing and contaminations.
  • High thermal shock resistance.
  • Chemically inert to almost all metals, liquids, and gas.
  • Large variety of PG heater and PGN heater shapes are available.

 

PBN Heater Applications

Boron Nitride ceramic from Advanced Ceramic Materials can withstand high temperatures in high vacuum environments, plus it has excellent corrosion resistance and electrical resistance. Thus, Boron Nitride ceramic product is an ideal choice in a wide range of industries, such as:
- Crucibles for crystal growth
- Break rings for horizontal casting machines
- Insulators for high-temperature furnace
- Electric insulators in vacuum system
- Feed through for high voltage equipment

Packing Service

ACM’s high-purity ceramic PBN heaters are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.

More PBN Products>>

Related Documents
Pyrolytic Boron Nitride Ceramic Materials Brochure
Technical brochure for Pyrolytic Boron Nitride Materials, all grades. Revision March 2023.
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