

High-purity and high-performance pyrolytic boron nitride ceramics are used as the substrate for the PBN heaters. Pyrolytic graphite (PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.
As both PG and PBN are extremely pure (99.99% or even higher) and very stable in vacuum or inert atmosphere, the PBN-PG heating element could be very durable and keep the chamber clean. It could be heated to ultra high 1600 ℃ in a very short time without emission of any gas component. These heating elements are ideal products for the semiconductor industry and applications that requires high temperature, high vacuum, and high purity.
Diameter | 0.5”~4” |
Power | 150~3000W |
Max. Working Temp. | 2400 ℃ |
Item |
value |
Unit |
|
lattice constant |
a:2.504×10-10 c:6.692×10-10 |
μ m |
|
density |
2.0-2.19 |
g/cm3 |
|
resistivity |
3.11×1011 |
Ω·cm |
|
tensile strength(ab) |
153.86 |
N/mm2 |
|
bend strength |
c |
243.63 |
N/mm2 |
ab |
197.76 |
N/mm2 |
|
elastic modulus |
235690 |
N/mm2 |
|
thermal conductivity |
“a” direction “c” direction |
||
(200℃) |
60 2.60 |
W/m·k |
|
(900℃) |
43.70 2.80 |
W/m·k |
|
dielectric strength(at room temperature) |
56 |
KV/mm |
Boron Nitride ceramic from Advanced Ceramic Materials can withstand high temperatures in high vacuum environments, plus it has excellent corrosion resistance and electrical resistance. Thus, Boron Nitride ceramic product is an ideal choice in a wide range of industries, such as:
- Crucibles for crystal growth
- Break rings for horizontal casting machines
- Insulators for high-temperature furnace
- Electric insulators in vacuum system
- Feed through for high voltage equipment
ACM’s high-purity ceramic PBN heaters are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.